Desktop vacuum setup VSE-PVD-DESK-PRO of magnetron sputtering

Desktop vacuum setup VSE-PVD-DESK-PRO of magnetron sputtering Configuration with automation system Setup is the best solution for the goals and objectives of the universities educational process. Setup is designed for magnetron sputtering of metallic and dielectric coatings on solid samples.

Main characteristics of setup:

Deposition rate (depends on the type of sputtering materials) up to 7,5 Å / sec;

Thickness uniformity up to 10%;
Adjustable power output from 0.1 to 3 kW;
Substrate position accuracy up to 0.5 mm;
Number of substrates 4 pcs of 100 mm diameter or 6 pcs of 70 mm diameter;
Substrate heating up to 250 0C;

Adjustable distance of the target relative to the magnetron up to 160 mm;
Two magnetron for multi-layer coating;
Control of the substrate position by a stepper motor with encoder.

Options:

Ion source;
Device for measuring the thickness of the coating.

Time of manufacture: 16-20 weeks

All products can be amended to meet high requirements and standards of specific industry.

The assortment of products and services we are offering is increasing rapidly.